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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Related Experiment Video

Updated: May 22, 2026

Scanning Electron Microscopic Evaluation of Surface Defects of Remover Retreatment File After Single and Multiple Uses

Scanning Electron Microscopic Evaluation of Surface Defects of Remover Retreatment File After Single and Multiple Uses

Published on: October 11, 2024

Do SE(II) electrons really degrade SEM image quality?

Gary H Bernstein¹, Andrew D Carter, David C Joy

¹Center for Nano Science and Technology, Department of Electrical Engineering, University of Notre Dame, Notre Dame, Indiana 46556, USA. bernstein.1@nd.edu

|May 17, 2012

Summary

This summary is machine-generated.

Researchers developed a spatial backscatter diaphragm to improve scanning electron microscopy (SEM) imaging. This new diaphragm minimizes unwanted signals, enhancing image resolution and clarity for scientific analysis.

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Area of Science:

Materials Science
Electron Microscopy
Nanotechnology

Background:

Scanning electron microscopy (SEM) imaging quality is often degraded by unwanted signal components.
Secondary electrons (SEs) generated by the primary beam (SE(I)) are ideal for high-resolution imaging.
Backscattered electrons (BSEs) and their associated SEs (SE(II)) introduce background noise, reducing contrast, signal-to-noise ratio, and resolution.

Purpose of the Study:

To develop a method for minimizing unwanted SE(II) signal components in SEM imaging.
To improve the quality and resolution of SEM images by isolating the desired SE(I) signal.
To enhance the overall performance of SEM for detailed nanoscale analysis.

Main Methods:

Introduction of a microfabricated diaphragm designed to block unwanted signal components.
Utilizing a microlithographically generated pattern of gold (Au), approximately 500 nm thick.
Testing the diaphragm's effectiveness in an SEM equipped with conventional or snorkel lens systems.

Main Results:

The spatial backscatter diaphragm effectively blocks most undesired SE(II) signal components.
SEM images composed primarily of SE(I) signals demonstrate improved contrast and clarity.
Evidence of enhanced imaging quality and resolution was observed using the developed diaphragm.

Conclusions:

The microfabricated spatial backscatter diaphragm is a viable solution for improving SEM image quality.
This technology allows for the isolation of SE(I) signals, leading to higher resolution and clearer images.
The diaphragm offers a significant advancement in SEM techniques for scientific research and material characterization.