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Related Concept Videos

Pressure Gauges01:20

Pressure Gauges

Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...

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Related Experiment Video

Updated: May 22, 2026

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing
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Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

Published on: March 17, 2023

Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor.

Willyan Hasenkamp1, David Forchelet, Kristopher Pataky

  • 1École Polytechnique Fédérale de Lausanne, Lausanne, Switzerland. hasenkamp@gmail.com

Biomedical Microdevices
|May 29, 2012
PubMed
Summary

This study developed a novel catheter-tip MEMS pressure sensor using polyimide and SU-8. The device accurately measured in vivo blood pressure and heart rate, showing potential for medical applications.

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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
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Last Updated: May 22, 2026

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing
05:57

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

Published on: March 17, 2023

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
10:28

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique

Published on: March 24, 2023

Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Biomedical Engineering

Background:

  • Development of miniaturized pressure sensors for medical applications is crucial.
  • Existing silicon-based sensors face limitations in certain in vivo applications.
  • Polyimide and SU-8 offer promising properties for flexible microelectromechanical systems (MEMS).

Purpose of the Study:

  • To develop and characterize a novel catheter-tip MEMS gauge pressure sensor.
  • To investigate the impact of critical design parameters using finite element analysis.
  • To evaluate the sensor's performance for in vivo blood pressure monitoring.

Main Methods:

  • Fabrication of the sensing element using polyimide-based micromachining with embedded thin-film metallic wires.
  • Sealing of the sensor chamber using an adapted SU-8 bonding technique.
  • Finite element analysis (FEA) for design optimization and performance prediction.
  • Experimental evaluation and comparison with commercial silicon-based sensors.
  • In vivo testing for blood pressure and heart rate measurement.

Main Results:

  • Successful development of a polyimide/SU-8 catheter-tip MEMS pressure sensor.
  • FEA provided insights into critical design parameters affecting sensing characteristics.
  • Experimental results demonstrated comparable or superior performance to commercial silicon sensors.
  • Successful in vivo demonstration of blood pressure and heart rate measurement.

Conclusions:

  • The developed polyimide/SU-8 MEMS sensor is a viable alternative for catheter-tip pressure sensing.
  • The sensor shows significant potential for accurate in vivo hemodynamic monitoring.
  • SU-8 bonding offers an effective method for sealing MEMS pressure sensor chambers.