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Updated: May 21, 2026
Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
Published on: July 2, 2012
Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography
Majid Ebrahimi Warkiani1, Chao-Ping Lou, Hai-Qing Gong
1School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang, Singapore 639798, Singapore.
Abstract:
Fast detection of waterborne pathogens is important for securing the hygiene of drinking water. Detection of pathogens in water at low concentrations and minute quantities demands rapid and efficient enrichment methods in order to improve the signal-to-noise ratio of bio-sensors. We propose and demonstrate a low cost and rapid method to fabricate a multi-layer polymeric micro-sieve using conventional lithography techniques. The micro-fabricated micro-sieves are made of several layers of SU-8 photoresist using multiple coating and exposure steps and a single developing process. The obtained micro-sieves have good mechanical properties, smooth surfaces, high porosity (≈40%), and narrow pore size distribution (coefficient of variation < 3.33%). Sample loading and back-flushing using the multi-layer micro-sieve resulted in more than 90% recovery of pathogens, which showed improved performance than current commercial filters.
