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Related Experiment Video

Updated: May 21, 2026

Microfluidic Chips Controlled with Elastomeric Microvalve Arrays
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Sealing SU-8 microfluidic channels using PDMS.

Zhiyi Zhang, Ping Zhao, Gaozhi Xiao

    Biomicrofluidics
    |June 5, 2012
    PubMed
    Summary
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    This study introduces a novel method for permanently sealing SU-8 microfluidic channels with polydimethylsiloxane (PDMS). The technique utilizes nitrogen plasma treatment and controlled heating to create a robust, water-resistant bond, enhancing microfluidic device fabrication.

    Area of Science:

    • Materials Science
    • Microfluidics Engineering

    Background:

    • Microfluidic devices require reliable sealing methods for optimal performance.
    • Current sealing techniques for SU-8 and PDMS can be limited in durability and water resistance.

    Purpose of the Study:

    • To develop a simple, irreversible sealing method for SU-8 microfluidic channels using PDMS.
    • To create a robust and water-resistant interface between SU-8 and PDMS.

    Main Methods:

    • Generating amino groups on PDMS surfaces via N(2) plasma treatment.
    • Inducing a chemical reaction between PDMS amino groups and residual epoxy groups on SU-8 at elevated temperatures.
    • Preserving SU-8 epoxy groups through post-exposure baking below 95°C.

    Main Results:

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    • Achieved irreversible sealing of SU-8 microfluidic channels with PDMS.
    • The resulting interface exhibits a bond strength exceeding the bulk strength of PDMS.
    • The seals are permanent and demonstrate long-term resistance to water exposure.

    Conclusions:

    • The developed method offers a simple and effective way to permanently bond SU-8 and PDMS.
    • This technique is suitable for fabricating robust SU-8 microfluidic-photonic integrated devices with desirable performance.
    • The enhanced bond strength and water resistance open new possibilities in microfluidic applications.