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Updated: May 21, 2026

Hybrid Printing for the Fabrication of Smart Sensors

Hybrid Printing for the Fabrication of Smart Sensors

Published on: January 31, 2019

A high sensitivity three-dimensional-shape sensing patch prepared by lithography and inkjet printing.

Yi-Ren Huang¹, Sheng-An Kuo, Michal Stach

¹Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsin Chu 30013, Taiwan. yrhuangsun@gmail.com

Sensors (Basel, Switzerland)

|June 6, 2012

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A novel manufacturing process combines photolithography and inkjet printing to create high-sensitivity, power-free three-dimensional-shape (3DS) sensing patches for remote deformation detection.

Area of Science:

Materials Science
Nanotechnology
Optical Sensing

Background:

Developing high-sensitivity, low-profile sensing patches is crucial for advanced monitoring applications.
Existing optical curvature sensors often require power or lack adaptability to diverse substrates.

Purpose of the Study:

To propose and demonstrate a hybrid manufacturing process for fabricating three-dimensional-shape (3DS) sensing patches.
To evaluate the performance and compatibility of inkjet printing with photolithography for sensor fabrication.

Main Methods:

A hybrid approach combining conventional photolithography with novel drop-on-demand (DOD) inkjet printing.
Finite Element Method (FEM) modeling based on column buckling and deflection equations to simulate sensor behavior.
Interferometer design enabling bi-directional deformation detection.

Keywords:

curvature sensor flexible electronics inkjet printing

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Hybrid Printing for the Fabrication of Smart Sensors

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Published on: January 31, 2019

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Main Results:

Successful fabrication of thin (less than 130 μm) 3DS sensing patches with dimensions of 20 × 20 mm².
Demonstrated compatibility between DOD inkjet printing and photolithography.
FEM simulations validated the sensor's operational principles and predicted performance across curvature ranges of 1.41 to 6.24 × 10⁻² mm⁻¹.
The sensor operates remotely without power consumption.

Conclusions:

The hybrid manufacturing process offers a viable method for producing high-sensitivity 3DS sensing patches.
The developed sensor is a power-free, remotely operable, and versatile alternative to existing optical curvature sensors.