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Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
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Structure of SrTiO3 films on Si

C Stephen Hellberg1, Kristopher E Andersen, Hao Li

  • 1Center for Computational Materials Science, Naval Research Laboratory, Washington, D.C. 20375, USA. hellberg@nrl.navy.mil

Physical Review Letters
|June 12, 2012
PubMed
Summary

Researchers explored strontium titanate (SrTiO3) films on silicon, discovering a unique interface structure that changes with film thickness. This finding is key to improving oxide film quality on silicon for advanced devices.

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