Tungsten wire grid polarizer for applications in the DUV spectral range

Area of Science:

• Optics and Photonics
• Materials Science

Background:

• Wire grid polarizers are crucial optical components.
• Developing broadband polarizers for shorter wavelengths (e.g., UV) presents fabrication challenges.

Purpose of the Study:

• To present a novel broadband wire grid polarizer.
• To achieve a spectral working range down to 193 nm.
• To evaluate tungsten as a grating material for performance.

Main Methods:

• Fabrication of a 100 nm period grating using spatial frequency doubling.
• Utilizing ultrafast electron beam lithography.
• Employing a sophisticated deposition technique for tungsten grating material.

Main Results:

• Demonstrated a broadband wire grid polarizer with a working range down to 193 nm.
• Measured approximately 44% transmission at 193 nm.
• Achieved an extinction ratio of 20 at 193 nm.

Conclusions:

• Tungsten is a suitable material for high-performance wire grid polarizers due to its high extinction ratio and transmission.
• The developed fabrication method enables the creation of sub-wavelength gratings for UV applications.
• The polarizer shows promise for use in deep ultraviolet (DUV) lithography and other optical systems.