Design and numerical simulation of an optofluidic pressure sensor

Area of Science:

• Optofluidics
• Optical Sensing
• Polymer Interferometry

Background:

• Microfluidic systems require precise measurement of air pressure and flow rate.
• Existing sensors may lack compactness, efficiency, or cost-effectiveness.
• Optical methods offer non-intrusive sensing capabilities.

Purpose of the Study:

• To present a numerical design for a compact, all-optical sensor for microfluidic air pressure and flow rate.
• To integrate optofluidic switch polymer interferometers for enhanced sensing.
• To demonstrate a sensor with low power consumption, compactness, and low cost.

Main Methods:

• Numerical design procedure utilizing a flexible air gap optical cavity.
• Simulation of optical interference patterns dependent on pressure.
• Incorporation of fluid flow rate and solid deformation effects.
• Application of the beam propagation method for optics and finite element method for mechanics.

Main Results:

• The optical interference pattern directly correlates with microfluidic air pressure.
• Numerical simulations accounted for fluid flow, solid deformation, and light interference.
• The sensor operates within a pressure range of 0-60±6% Pa at 20 °C.
• The design emphasizes low power consumption, compactness, low cost, and short length.

Conclusions:

• The proposed optofluidic sensor design is effective for measuring microfluidic air pressure and flow rate.
• The integration of polymer interferometers and optical cavities enables sensitive pressure detection.
• This sensor represents a significant advancement in compact, low-cost optical sensing technology.