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Updated: May 21, 2026

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
Published on: August 30, 2012
Surface periodic domain structures for waveguide applications
Lyudmila S Kokhanchik1, Maxim V Borodin, Nikolay I Burimov
1Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow region, Russia. mlk@iptm.ru
Abstract:
We report the results of fabrication and investigations of surface periodic domain structures created by a set of quasi-point e-beam irradiations both on the Y- and X-cuts of LiNbO(3), and on Ti:LiNbO(3) and Zn:LiNbO(3) planar waveguides. Domain gratings with spatial periods from 4.75 to 7.25 μm were formed by a 25-keV e-beam. Doses from 500 to 2000 μC/cm(2) were used for different structures to estimate optimal fabrication conditions. The investigations allowed the visualization of the formed surface domain structures, estimation of their uniformity, and determination of waveguide generation of the second optical harmonic. The surface structures can be used in optical devices for the realization of quasi-phase-matched frequency conversion, which includes the creation of compact radiation sources based on waveguides.
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