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Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach.
Peng Su1, Yuhao Wang, James H Burge
1University of Arizona College of Optical Sciences, 1630 East University Boulevard, Tucson, Arizona 85721, USA. midir@bnl.gov
Optics Express
|June 21, 2012
Summary
The Software Configurable Optical Test System (SCOTS) offers efficient optical metrology for X-ray mirrors. This technique precisely measures surface slope errors with high accuracy, crucial for advanced optical systems.
Area of Science:
- Optical Metrology
- X-ray Optics
- Surface Metrology
Background:
- The University of Arizona previously developed the Software Configurable Optical Test System (SCOTS).
- SCOTS is based on the principle of reflection deflectometry.
- Efficient optical metrology is essential for characterizing X-ray optics.
Purpose of the Study:
- To present the application of SCOTS for X-ray mirror metrology.
- To evaluate the precision and accuracy of SCOTS for surface slope error measurement.
- To demonstrate the system's capability in measuring spherical mirrors.
Main Methods:
- Application of the Software Configurable Optical Test System (SCOTS).
- Measurement of surface slope errors using reflection deflectometry.
- Calibration of the metrology system and accuracy assessment.
Main Results:
- Achieved precision better than 100 nrad (rms) for surface slope errors.
- Achieved accuracy better than ~200 nrad (rms).
- Demonstrated lateral resolution of a few millimeters or less.
Conclusions:
- SCOTS is an efficient and precise optical metrology method for X-ray mirrors.
- The technique provides high-accuracy measurements suitable for demanding optical applications.
- SCOTS is effective for characterizing both general and spherical mirror surfaces.
