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Updated: May 21, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Free-standing guided-mode resonance band-pass filters: from 1D to 2D structures
Emilie Sakat1, Grégory Vincent, Petru Ghenuche
1ONERA The French Aerospace Lab, Chemin de la Huni`ere, F-91760 Palaiseau, France.
Abstract:
We study experimentally and theoretically band-pass filters based on guided-mode resonances in free-standing metal-dielectric structures with subwavelength gratings. A variety of filters are obtained: polarizing filters with 1D gratings, and unpolarized or selective filters with 2D gratings, which are shown to behave as two crossed-1D structures. In either case, a high transmission (up to ≈ 79 %) is demonstrated, which represents an eight-fold enhancement compared to the geometrical transmission of the grating. We also show that the angular sensitivity strongly depends on the rotation axis of the sample. This behavior is explained with a detailed description of the guided-mode transmission mechanism.
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