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Updated: May 21, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Janusz Murakowski1, Garrett J Schneider, Dennis W Prather
1Department of Electrical and Computer Engineering, University of Delaware, Newark, Delaware 19716, USA. jam@udel.edu
The spur-free dynamic range (SFDR) of injection-locked laser modulators was analyzed. SFDR approaches Mach-Zehnder performance near half the locking range but degrades at lower frequencies.
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