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Updated: May 21, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Reconfigurable silicon thermo-optical ring resonator switch based on Vernier effect control
William S Fegadolli1, German Vargas, Xuan Wang
1Instituto Tecnológico de Aeronáutica – ITA, Brazil. fegadoli@caltech.edu
Abstract:
A proof-of-concept for a new and entirely CMOS compatible thermo-optic reconfigurable switch based on a coupled ring resonator structure is experimentally demonstrated in this paper. Preliminary results show that a single optical device is capable of combining several functionalities, such as tunable filtering, non-blocking switching and reconfigurability, in a single device with compact footprint (~50 μm x 30 μm).
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