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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Reconfigurable silicon thermo-optical ring resonator switch based on Vernier effect control.

William S Fegadolli1, German Vargas, Xuan Wang

  • 1Instituto Tecnológico de Aeronáutica – ITA, Brazil. fegadoli@caltech.edu

Optics Express
|June 21, 2012
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Summary

A novel thermo-optic reconfigurable switch using coupled ring resonators is demonstrated. This compact device integrates tunable filtering, non-blocking switching, and reconfigurability on a single chip.

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Area of Science:

  • Photonics and Optical Engineering
  • Integrated Optics
  • Semiconductor Devices

Background:

  • Thermo-optic switches are crucial for optical communication networks.
  • Existing devices often lack integration or reconfigurability.
  • Complementary metal-oxide-semiconductor (CMOS) compatibility is desired for scalable manufacturing.

Purpose of the Study:

  • To demonstrate a proof-of-concept for a new CMOS-compatible thermo-optic reconfigurable switch.
  • To integrate multiple optical functionalities into a single, compact device.
  • To explore the potential of coupled ring resonator structures for advanced optical switching.

Main Methods:

  • Experimental demonstration of a thermo-optic switch.
  • Utilizing a coupled ring resonator (CRR) structure.
  • Fabrication compatible with standard CMOS processes.

Main Results:

  • Successful experimental demonstration of the thermo-optic reconfigurable switch.
  • The device integrates tunable filtering, non-blocking switching, and reconfigurability.
  • Achieved a compact device footprint of approximately 50 μm x 30 μm.

Conclusions:

  • A single, compact optical device can achieve multiple functionalities.
  • The demonstrated switch is CMOS compatible, enabling scalable integration.
  • Coupled ring resonator structures offer a promising platform for reconfigurable photonic integrated circuits.