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Updated: May 21, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Highly integrated 3×3 silicon thermo-optical switch using a single combined phase shifter for optical interconnects
Wanjun Wang1, Haifeng Zhou, Jianyi Yang
1Department of Information Science and Electronics Engineering, Zhejiang University, Hangzhou, 310027, China.
A novel 3x3 thermo-optical switch on silicon on insulator offers simple control and high integration. This compact optical switch demonstrates full functionality, paving the way for advanced photonic integrated circuits.
Area of Science:
- Photonics
- Integrated Optics
- Semiconductor Devices
Background:
- Conventional multiway optical switches often require complex control mechanisms and extensive space.
- Thermo-optical switches offer a promising alternative for optical signal routing due to their scalability and CMOS compatibility.
Purpose of the Study:
- To experimentally demonstrate a novel 3x3 thermo-optical switch on silicon on insulator (SOI).
- To showcase a simplified control method for optical switching with a highly integrated structure.
- To explore the generalizability of the proposed design for 1xN and NxN optical switch configurations.
Main Methods:
- Fabrication of a 3x3 thermo-optical switch using complementary metal-oxide-semiconductor (CMOS) technology.
- Utilizing a single combined phase shifter for controlling light routing between input and output waveguides.
- Experimental validation of the switching functionality at a wavelength of 1.55 μm.
Main Results:
- Full 3x3 switching functionality was successfully demonstrated.
- Achieved an average crosstalk of -11.1 dB, indicating efficient signal isolation.
- Measured a power consumption of 97.5 mW for the device operation.
Conclusions:
- The proposed thermo-optical switch offers a simple and highly integrated solution for optical routing.
- The design is scalable to larger NxN configurations without additional phase shifters.
- This advancement holds potential for next-generation optical communication and computing systems.
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