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Updated: May 21, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Jung-Ping Liu1, Chieh-Cheng Lee, Ying-Hau Lo
1Department of Photonics, Feng Chia University, 100 Wenhwa Road Seatwen, Taichung 40724, Taiwan. jpliu@fcu.edu.tw
Optical scanning holography (OSH) is enhanced by using a special filter to create vertical-bandwidth-limited (VBL) holograms. This significantly reduces hologram size and acquisition time while maintaining resolution.
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