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Updated: May 21, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Superresolved and field-of-view extended digital holography with particle encoding
Zeev Zalevsky1, Eran Gur, Javier Garcia
1Faculty of Engineering, Bar-Ilan University, Ramat-Gan 52900, Israel. zalevsz@biu.ac.il
Abstract:
We present a new configuration for superresolution (SR) as well as for field-of-view (FOV) extension in a digital holography concept based on random movement of sparse metallic particles. In the SR configuration, the particles are in proximity to the recorded object, while in the FOV configuration, the particles are in proximity to the hologram plane. The particles' movement encodes the high spatial features in the plane of their movement. This high-resolution information can later be decoded by proper numerical postprocessing that either remedies the resolution limitations in the object plane (or the limited NA of the lens) or extends the FOV in the object plane.
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