Soft x-ray tomography for real-time applications: present status at Tore Supra and possible future developments

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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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D Mazon1, D Vezinet, D Pacella

  • 1CEA, IRFM 13108 Saint-Paul-lez-Durance, France.

The Review of Scientific Instruments
|July 5, 2012
PubMed

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