Is it possible to measure diameters of metal nanoparticles using BSE imaging in FESEM?

The possibilities of using a field emission scanning electron microscope (FESEM) equipped with an Autrata improved yttrium aluminum garnet (YAG) detector of back-scattered electrons (BSE) for a determination of metal nanoparticles sizes were examined in this study. The diameters of Au and Pd nanoparticles with different sizes were resolved based on digitally recorded FESEM micrographs and were compared with diameters obtained with a transmission electron microscope (TEM). In the case of Au nanoparticles, the data obtained from the FESEM exhibited smaller values in comparison with data from the TEM. The Pd nanoparticles diameters measured in the FESEM were comparable with those determined by means of the TEM, however. The influence of various parameters like the sizes of nanoparticles, their composition, use of accelerating voltage and other working conditions in the FESEM on the measurement results are discussed.