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Updated: May 20, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Department of Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8602, Japan. kino@z.phys.nagoya-u.ac.jp
This study enhances computer-generated hologram (CGH) interferometers for measuring off-axis aspherical mirrors. The improved method achieves high lateral resolution, crucial for large telescope mirror fabrication.
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