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A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide
Ter-Hoe Loh1, Qian Wang, Keh-Ting Ng
1Data Storage Institute, 5 Engineering Drive-1, Singapore 117608, Singapore. loh_ter_hoe@dsi.a-star.edu.sg
Optics Express
|July 10, 2012
Abstract:
We present a CMOS compatible mass manufacturable, compact Si/SiO(2) multilayer GRIN lens mode size converter from standard single mode fiber to 300 nm-thick Si waveguide. The fiber-to-GRIN lens coupling loss is 2.6 ± 0.3 dB (coupling efficiency: 51~60%) with optimized focal length of 11.6~11.8 μm and Si/SiO(2) multilayer thickness of 7.4 μm.
