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Related Experiment Video

Updated: May 20, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

High-speed silicon modulator based on cascaded microring resonators.

Yingtao Hu¹, Xi Xiao, Hao Xu

¹State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing, 100083, China.

|July 10, 2012

Summary

This study demonstrates a high-speed silicon modulator using cascaded double microring resonators, achieving 40 Gbit/s modulation. The novel design enhances optical bandwidth, enabling ultra-high-speed optical modulation.

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Area of Science:

Photonics
Optical Communications
Semiconductor Devices

Background:

Silicon photonics enables high-speed optical modulation.
Microring resonators are key components in photonic integrated circuits.
Achieving ultra-high bandwidth and speed in modulators is crucial for data transmission.

Purpose of the Study:

To demonstrate a high-speed silicon modulator.
To investigate the performance enhancement using cascaded double microring resonators.
To achieve ultra-high optical and electrical bandwidth.

Main Methods:

Fabrication of a silicon modulator based on cascaded double microring resonators.
Experimental characterization of modulation speed and extinction ratio.
Measurement of optical and electrical bandwidth.

Main Results:

Experimental demonstration of 40 Gbit/s modulation.
Achieved an extinction ratio of 3.9 dB.
Obtained an ultra-high optical bandwidth of 0.41 nm (51 GHz).

Conclusions:

The cascaded double microring resonator structure effectively enhances modulator performance.
The demonstrated silicon modulator offers ultra-high-speed optical modulation capabilities.
The device shows potential for improved electrical bandwidth, benefiting optical communication systems.