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Updated: May 20, 2026
09:10
Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
High-frequency silicon optomechanical oscillator with an ultralow threshold
Wei C Jiang1, Xiyuan Lu, Jidong Zhang
1Institute of Optics, University of Rochester, Rochester, New York 14627, USA.
Optics Express
|July 10, 2012
Summary
We developed a highly efficient silicon microdisk optomechanical oscillator. This compact, CMOS-compatible device operates at high frequencies with low power, enabling advanced photonic-phononic applications.
Area of Science:
- Optomechanics
- Nanophotonics
- Microelectromechanical Systems (MEMS)
Background:
- Optomechanical oscillators are crucial for signal processing and sensing.
- Developing compact, efficient devices with high operating frequencies is a key challenge.
Purpose of the Study:
- To demonstrate a highly efficient optomechanical oscillator using a silicon microdisk resonator.
- To characterize its optomechanical coupling, mechanical quality factor, and operating threshold.
Main Methods:
- Fabrication of a silicon microdisk resonator with a 2-μm radius.
- Measurement of optomechanical coupling strength and mechanical frequency-Q product.
- Characterization of device performance, including operating frequency and threshold power.
Main Results:
- Achieved strong optomechanical coupling (115 GHz/nm) and a high mechanical frequency-Q product (4.32 × 10^12 Hz).
- Demonstrated operation at a high frequency (1.294 GHz) with an ultralow threshold power (3.56 μW) in air.
- The device is structurally compact and CMOS compatible.
Conclusions:
- The demonstrated silicon microdisk optomechanical oscillator offers high efficiency and frequency.
- Its compactness and CMOS compatibility make it suitable for integrated photonic-phononic systems.
- Potential applications include advanced signal processing, sensing, and metrology.
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