High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond
Lan Jiang1, Pengjun Liu, Xueliang Yan
1NanoManufacturing Fundamental Research Joint Laboratory of National Science Foundation of China, School of Mechanical Engineering, Beijing Institute of Technology, 100081, China. jianglan@bit.edu.cn
Abstract:
This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities.
More Related Videos
14:09High-Throughput Total Internal Reflection Fluorescence and Direct Stochastic Optical Reconstruction Microscopy Using a Photonic Chip
Published on: November 16, 2019
11:14A Microfluidic System with Surface Patterning for Investigating Cavitation Bubble(s)–Cell Interaction and the Resultant Bioeffects at the Single-cell Level
Published on: January 10, 2017