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Updated: May 20, 2026
09:34
Implementation of Portable Emissions Measurement Systems (PEMS) for the Real-driving Emissions (RDE) Regulation in Europe
Published on: December 4, 2016
ESEM modifications to LEO SUPRA 35 VP FESEM.
Vassileios Dracopoulos1, Gerasimos Danilatos
1ICE-HT, Stadiou Str., Platani P.O. Box 1414, GR-26504 Patras, Hellas, Greece.
Micron (Oxford, England : 1993)
|July 31, 2012
Summary
A modified Low Pressure Scanning Electron Microscope (LP-SEM) enhances image quality and enables environmental operation. This upgrade allows for high-pressure imaging, expanding analytical capabilities for researchers.
Area of Science:
- Materials Science
- Analytical Chemistry
- Microscopy
Background:
- Traditional Low Pressure Scanning Electron Microscopes (LP-SEM) face limitations in image quality at low pressures.
- Environmental Scanning Electron Microscopy (ESEM) allows for imaging under higher pressures but requires specific instrumentation.
Purpose of the Study:
- To modify a LEO SUPRA 35 VP FESEM for improved low-pressure imaging.
- To enable the FESEM to operate as a fully fledged ESEM with high specimen chamber pressures.
Main Methods:
- Modification of the FESEM with a diamagnetic insert.
- Incorporation of a thin pressure-limiting aperture at the pole-piece bottom.
- Utilizing various aperture sizes in conjunction with the existing differential diaphragm.
Main Results:
- Significant improvement in image quality in low-pressure mode.
- Successful operation as an ESEM with specimen chamber pressures exceeding 2000 Pa.
- Demonstrated versatility through the use of different aperture sizes.
Conclusions:
- The FESEM modification enhances imaging performance in low-pressure conditions.
- The upgraded system effectively functions as an ESEM, broadening its application range.
- This technical advancement offers a cost-effective solution for high-pressure SEM analysis.
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