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Updated: May 20, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
The first years of the aberration-corrected electron microscopy century
1Institute for Advanced Materials, Devices and Nanotechnology, Rutgers University, Piscataway, NJ 08854, USA. batson@physics.rutgers.edu
Abstract:
Aberration correction, after a 50 year incubation period of developing ideas and techniques while awaiting enabling technology, has transformed electron microscopy during the first dozen years of the 21st century. Some of the conditions that accompanied this transformation, the required complexity and its effect on the way microscopy is pursued, recent results that promise to change the field, and directions for the future are briefly described.
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