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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique

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Published on: March 24, 2023

High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm.

Feng Xu¹, Dongxu Ren, Xiaolong Shi

¹School of Physics and Materials Science, Anhui University, Hefei 230039, China. fengx@ahu.edu.cn

|August 3, 2012

Summary

We developed a novel fiber-optic pressure sensor using a nanothick silver diaphragm. This cost-effective sensor offers high sensitivity for precise pressure measurements.

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Area of Science:

Optoelectronics
Materials Science
Nanotechnology

Background:

Fiber-optic sensors offer advantages in harsh environments.
Developing highly sensitive, cost-effective pressure sensors is crucial for various applications.
Nanostructured materials enable novel sensing functionalities.

Purpose of the Study:

To present a fiber-optic extrinsic Fabry-Perot interferometer (EFPI) pressure sensor.
To utilize a nanothick silver diaphragm for enhanced sensing performance.
To demonstrate a cost-effective and simple fabrication method.

Main Methods:

Fabrication of a nanothick silver diaphragm using electroless plating.
Integration of the diaphragm into an EFPI configuration.
Characterization of the sensor's response to pressure variations.

Main Results:

The sensor demonstrated a linear response over a 0-50 kPa pressure range.
Achieved a high pressure sensitivity of 70.5 nm/kPa.
The electroless plating method provided a simple, low-cost, high-quality diaphragm.

Conclusions:

The developed EFPI pressure sensor based on a nanothick silver diaphragm shows significant potential.
The sensor offers high sensitivity and a cost-effective fabrication process.
This technology is promising for applications requiring highly sensitive pressure detection.