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Related Concept Videos

IR Spectrometers01:25

IR Spectrometers

There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...

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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry.

Pei Zhu1, Kaiwei Wang

  • 1State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, China.

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Spectrally resolved white-light interferometry (SRWLI) enables 2D profile measurements of narrow areas using a frequency comb. This technique separates interference patterns by wavelength for precise analysis of small sample widths.

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Area of Science:

  • Optical metrology
  • Interferometry
  • Spectroscopy

Background:

  • Spectrally resolved white-light interferometry (SRWLI) analyzes spectral phase information for single-frame profilometry.
  • Existing SRWLI methods are often limited in their ability to measure specific sample geometries.

Purpose of the Study:

  • To present a novel two-dimensional (2D) SRWLI method for measuring narrow rectangular areas.
  • To demonstrate the application of a frequency comb for enhanced 2D profilometry.

Main Methods:

  • Utilized a Fabry-Perot (F-P) etalon to generate a frequency comb from a broadband source.
  • Employed the frequency comb illumination to separate interference patterns of adjacent wavelengths.
  • Developed a 2D SRWLI technique capable of measuring narrow rectangular regions.

Main Results:

  • Achieved separation of interference patterns under adjacent wavelengths due to frequency comb illumination.
  • Enabled the acquisition of a 2D profile with a small width, suitable for narrow areas.
  • Successfully demonstrated the method through experimental measurements on a step sample.

Conclusions:

  • The presented 2D SRWLI method effectively measures narrow rectangular areas.
  • Frequency comb generation via F-P etalon filtering is a viable approach for enhancing SRWLI capabilities.
  • This technique offers a precise and efficient solution for 2D profilometry in specific applications.