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Updated: May 19, 2026

Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution

Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution

Published on: August 16, 2012

Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator.

Tatsutoshi Shioda¹, Takashi Morisaki, Tuan Quoc Banh

¹Department of Electric Engineering, Nagaoka University of Technology, Niigata, Japan. tshioda@vos.nagaokaut.ac.jp

|August 4, 2012

Summary

This summary is machine-generated.

This study expands virtually imaged phased array (VIPA) optical interferometry to 2D tomography, enabling single-shot 3D surface profiling with high resolution and measurement range.

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Area of Science:

Optical physics
Metrology
Imaging techniques

Background:

Traditional optical interferometry often limited to 1D measurements.
Need for advanced 3D surface profiling techniques in metrology.

Purpose of the Study:

To develop a 2D tomographic imaging technique using a virtually imaged phased array (VIPA) optical interferometer.
To achieve single-shot 3D surface profiling with preserved resolution and measurement range.

Main Methods:

Implementation of a spatial phase modulator for single-shot measurement.
Utilizing a 2D charge-coupled device (CCD) image sensor to capture interferometric data.
Employing a VIPA optical device for 2D tomography.

Main Results:

Achieved 2D tomography from a previous 1D technique, maintaining resolution and measurement range.
Demonstrated single-shot surface profiling with a repeatability of 5 μm.
Experimental resolution of 53 μm achieved using amplified spontaneous emission light source.
Confirmed 2D scanless profilometry at a 30 frames per second (FPS) rate.

Conclusions:

The enhanced VIPA optical interferometer successfully enables 2D tomographic imaging and scanless 3D surface profilometry.
The system offers high resolution, a wide measurement range, and single-shot acquisition capabilities.
This advancement has significant implications for metrology and surface characterization applications.