[Application progress of laser-induced breakdown spectroscopy for surface analysis in materials science field]

Area of Science:

• Surface analysis
• Spectroscopy
• Material science

Context:

• Laser-induced breakdown spectroscopy (LIBS) has emerged as a significant surface analytical tool over the past decade.
• Its fundamental theory, instrumentation, and diverse applications in material science are detailed.
• The review focuses on advancements in elemental distribution and depth profile analysis.

Purpose:

• To provide a comprehensive review of Laser-induced breakdown spectroscopy (LIBS).
• To discuss the application progress of LIBS in metallurgy, semiconductor, and electronic materials.
• To highlight factors influencing LIBS resolution and suggest improvements.

Summary:

• LIBS utilizes laser-induced plasma emission for elemental analysis of materials.
• Key parameters like pulse energy, ambient gas, pressure, and laser beam energy distribution critically affect spatial and depth resolution.
• An approach to enhance resolution while considering analytical sensitivity is presented.

Impact:

• LIBS offers advantages over traditional methods, including a large scanning area and high analytical speed.
• It can analyze both conducting and non-conducting materials.
• LIBS serves as a powerful complementary technique for surface analysis in various scientific fields.