Coupling-of-modes analysis and modeling of polymer-coated surface acoustic wave resonators for chemical sensors

The analysis and modeling of SAW resonator devices based on the coupling-of-modes (COM) theory are described, integrating the effect of polymer coating so that the sensor effects can be accounted for in the device transfer function. Based on the perturbation method, the effects of film coating are included in determining the parameters for the model. The COM parameters are, therefore, modified and its simple analytical approaches are presented. The model is validated using the experimental data of a two-port SAW resonator device fabricated on ST-X quartz substrate. The experimental results for a device coated with Parylene C are compared with the simulation results of the proposed model. The comparative results of the electrical characteristics and the frequency sensitivity to film thickness show a good agreement which proves the validity of the model. This analysis and model will provide insight into the influence of the device design parameters on the sensor performance and help in practical design and optimization of SAW-based chemical sensor systems.