Synthesis, structure and properties of superhard nanostructured films deposited by the C60 ion beam

In this work, we present results on study of DLC, nanocomposite and nanocrystal nanographite films synthesized utilizing mass-separated beam of C60-ions with energy in range from 2 to 6 keV (energy dispersions approximately 1 keV) and at Ts in the range of RT - 873 K. The dependence of the structure, mechanical and electrical properties from the ion energy and substrate temperature was revealed. We demonstrate a possibility to control the orientation of the base planes in the nanographite grains during the film growth. The dependence of mechanical properties of the films from the orientation of the base planes was defined. It is discussed a mechanisms of oriented growth for nanocrystal graphite. Possible applications of the textured nanocomposite and nanographite films are nanodevices, thin-filmed lithium batteries and field-emitter arrays.