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Implementation of a Nonlinear Microscope Based on Stimulated Raman Scattering
Published on: July 6, 2019
Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line
Michael Bohling1, Thomas Seiler, Boguslaw Wdowiak
1University of Hagen, Chair of Micro- and Nanophotonics, Universitätsstr. 27, D-58097 Hagen, Germany.
Abstract:
We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is 1 mm×10 mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to apply it to the implementation of a transversal filter for femtosecond pulses. We present a theoretical description of the performance of the retroreflector array as a filtering device and show experimental results.
