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Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line
Michael Bohling1, Thomas Seiler, Boguslaw Wdowiak
1University of Hagen, Chair of Micro- and Nanophotonics, Universitätsstr. 27, D-58097 Hagen, Germany.
Applied Optics
|September 5, 2012
Summary
Researchers fabricated a micro-retroreflector array using X-ray lithography and the LIGA process. This device can be used as a transversal filter for femtosecond pulses in spectrometers.
Area of Science:
- Optics and Photonics
- Microfabrication
- Materials Science
Background:
- Micro-optical elements are crucial for advanced spectroscopic applications.
- High-precision fabrication methods are needed for creating complex optical components.
Purpose of the Study:
- To report the fabrication of a one-dimensional micro-retroreflector array.
- To investigate its potential application as a transversal filter for femtosecond pulses.
Main Methods:
- Fabrication using X-ray lithography and the LIGA process on a poly(methyl methacrylate) (PMMA) layer.
- Deposition of a gold (Au) layer for reflective properties.
- Characterization of the micro-retroreflector array's performance.
Main Results:
- Successful fabrication of a 1 mm x 10 mm micro-retroreflector array with a 100 μm pitch.
- Demonstration of the array's suitability for spectrometer applications.
- Theoretical and experimental validation of its performance as a femtosecond pulse transversal filter.
Conclusions:
- The LIGA process enables high-precision fabrication of micro-optical elements.
- The micro-retroreflector array shows promise for advanced optical filtering applications.
- This technology can enhance the capabilities of femtosecond pulse manipulation in spectroscopy.
