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Laser differential confocal radius measurement system.

Ruoduan Sun1, Lirong Qiu, Jiamiao Yang

  • 1Key Laboratory of Photoelectronic Imaging Technology and System, Ministry of Education of China, Opto-Electronic College, Beijing Institute of Technology, China.

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|September 13, 2012
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Summary
This summary is machine-generated.

A new laser differential confocal system precisely measures the radius of curvature for optical manufacturing. This high-accuracy system achieves 2 ppm theoretical accuracy, enhancing metrology applications.

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Area of Science:

  • Optical metrology
  • Precision engineering
  • Laser-based measurement systems

Background:

  • Accurate radius of curvature measurement is critical in optical manufacturing.
  • Existing metrology systems face limitations in precision and error reduction.

Purpose of the Study:

  • To develop a laser differential confocal radius measurement system with high accuracy.
  • To minimize measurement errors in radius of curvature determination.

Main Methods:

  • Utilizing the zero-crossing point of the differential confocal intensity curve for precise position identification.
  • Employing an interferometer to measure the distance between cat's-eye and confocal positions.
  • Implementing a coaxial measuring optical path to reduce Abbe error and an air-bearing slider for motion error reduction.

Main Results:

  • Achieved high-precision measurement for the radius of curvature.
  • Theoretical accuracy demonstrated up to 2 parts per million (ppm).
  • Experimental results show high focusing sensitivity, minimal environmental fluctuation impact, and measuring repeatability between 4 and 12 ppm.

Conclusions:

  • The developed laser differential confocal system offers superior accuracy for radius of curvature measurements.
  • The system is suitable for demanding optical manufacturing and metrology applications.
  • The design effectively mitigates common sources of measurement error, leading to enhanced precision.