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Updated: May 18, 2026
Dry Oxidation and Vacuum Annealing Treatments for Tuning the Wetting Properties of Carbon Nanotube Arrays
Published on: April 15, 2013
Deposition of platinum on oxygen plasma treated carbon nanotubes by atomic layer deposition
Yang-Chih Hsueh1, Chih-Chieh Wang, Chueh Liu
1Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.
Abstract:
Platinum nanoparticles were deposited on oxygen plasma treated carbon nanotubes (CNTs) by atomic layer deposition (ALD). The treatment time with oxygen plasma generated by microwaves under a power of 600 W varied from 5 to 20 s. The number of ALD cycles was controlled at 5-125. X-ray photoelectron spectroscopic analysis indicated that oxygen plasma can graft oxygen-containing functional groups to the CNT surface to act as nucleation sites for growth of Pt nanoparticles. Formation of very uniform and well distributed Pt nanoparticles of a size of 1.60-4.80 nm was achieved. The growth rate of Pt nanoparticles could be controlled by the number of ALD cycles and oxygen plasma treatment time. This offers a dry process to deposit well-dispersed metallic nanoparticles on selected support materials.
