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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
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Surface microanalysis by reflection electron energy-loss spectroscopy.

Z L Wang1

  • 1Cavendish Laboratory, Cambridge, England.

Journal of Electron Microscopy Technique
|January 1, 1990
PubMed
Summary
This summary is machine-generated.

This study clarifies physical concepts for surface microanalysis using Reflection Electron Energy-Loss Spectroscopy (REELS). It shows reflected electrons near Bragg spots can be analyzed for elemental concentration and specimen thickness.

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Area of Science:

  • Materials Science
  • Surface Analysis
  • Spectroscopy

Background:

  • Reflection Electron Energy-Loss Spectroscopy (REELS) is a powerful surface analysis technique.
  • Quantitative microanalysis using REELS requires a clear understanding of the underlying physical principles.

Purpose of the Study:

  • To clarify fundamental physical concepts for applying the equation Ik = I sigma Nxt in REELS surface microanalysis.
  • To investigate the distribution and characteristics of reflected inelastic electrons in REELS.

Main Methods:

  • Analysis of the relationship between integrated intensities (Ik, I), scattering cross-section (sigma), atomic concentration (Nx), and specimen thickness (t).
  • Characterization of reflected inelastic electron distribution using a Lorentzian function.
  • Utilizing diffracted spots for Electron Energy-Loss Spectroscopy (EELS) microanalysis.

Main Results:

  • The equation Ik = I sigma Nxt is clarified for quantitative REELS analysis.
  • Reflected inelastic electrons exhibit near-symmetric distribution around Bragg spots, fitting a Lorentzian function.
  • EELS microanalysis is feasible using diffracted spots.

Conclusions:

  • The study provides a clearer physical basis for quantitative surface microanalysis with REELS.
  • Accurate analysis requires considering the omega correction due to angular contributions to the spectrometer.