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Generation and Control of Electrohydrodynamic Flows in Aqueous Electrolyte Solutions
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Nanoelectromechanical devices in a fluidic environment.

Oleksiy Svitelskiy1, Vince Sauer, Douglass Vick

  • 1Department of Physics, University of Alberta, Edmonton, Canada. oleksiysvit@yahoo.com

Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics
|September 26, 2012
PubMed
Summary

Nanoelectromechanical systems damping in fluids is better explained by new models than traditional ones. New research offers insights into nanoscale fluid damping across various pressures.

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Last Updated: May 18, 2026

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Area of Science:

  • Physics
  • Materials Science
  • Nanotechnology

Background:

  • Traditional models for microresonator damping are insufficient for nanoresonators.
  • Understanding fluid-device interactions at the nanoscale is crucial for NEMS applications.

Purpose of the Study:

  • To evaluate theoretical models of device-fluid interactions for nanoelectromechanical systems (NEMS) under varying pressures.
  • To identify the most accurate models for describing damping phenomena in NEMS across different pressure regimes.

Main Methods:

  • Monitoring resonant responses and quality factors of NEMS in five gases and one liquid.
  • Testing devices at pressures from vacuum to 20 MPa.
  • Utilizing focused ion beam to correct device shape and differentiate damping factors.

Main Results:

  • The Knudsen number is inadequate for intermediate pressures; the Weissenberg number and Yakhot and Colosqui model are superior.
  • The phenomenological model of vibrating spheres and the Sader and Bhiladvala model accurately describe high-pressure damping.
  • Squeezed film (SF) and undercut effects significantly increase damping, with the SF model performing well at high pressures.

Conclusions:

  • New models provide better physical characterization of nanoscale fluid damping than traditional approaches.
  • The Sader and Bhiladvala model accurately predicts pressure-dependent viscous mass load and damping.
  • This study offers fundamental insights into nanoscale fluid damping mechanisms, particularly at intermediate and high pressures.