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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
I Groma1, G Györgyi, P D Ispánovity
1Department of Materials Physics, Eötvös University Budapest, H-1517 Budapest POB 32, Hungary. groma@metal.elte.hu
No abstract available in PubMed .