[The design and experiment of multi-parameter water quality monitoring microsystem based on MOEMS microspectrometer]

Aiming at the monitoring and protecting of water resource environment, a multi-parameter water quality monitoring microsystem based on microspectrometer was put forward in the present paper. The microsystem is mainly composed of MOEMS microspectrometer, flow paths system and embedded measuring & controlling system. It has the functions of self-injecting samples and detection regents, automatic constant temperature, self -stirring, self- cleaning and samples' spectrum detection. The principle prototype machine of the microsystem was developed, and its structure principle was introduced in the paper. Through experiment research, it was proved that the principle prototype machine can rapidly detect quite a few water quality parameters and can meet the demands of on-line water quality monitoring, moreover, the principle prototype machine has strong function expansibility.