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Updated: May 18, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
Abu Sebastian1, Naveen Shamsudhin, Hugo Rothuizen
1IBM Research-Zurich, 8803 Rüschlikon, Switzerland. ase@zurich.ibm.com
New cantilevers with aluminum nitride (AlN) actuators and platinum silicide (PtSi) tips enable advanced multi-frequency atomic force microscopy. These novel devices demonstrate excellent dynamic performance for versatile imaging applications.
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