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Updated: May 18, 2026

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
(Sub)surface mobility of oxygen vacancies at the TiO2 anatase (101) surface
Philipp Scheiber1, Martin Fidler, Olga Dulub
1Institute of Applied Physics, Vienna University of Technology, Vienna, Austria.
Abstract:
Anatase is a metastable polymorph of TiO2. In contrast to the more widely studied TiO2 rutile, O vacancies (V(O)'s) are not stable at the anatase (101) surface. Low-temperature STM shows that surface V(O)'s, created by electron bombardment at 105 K, start migrating to subsurface sites at temperatures ≥200 K. After an initial decrease of the V(O) density, a temperature-dependent dynamic equilibrium is established where V(O)'s move to subsurface sites and back again, as seen in time-lapse STM images. We estimate that activation energies for subsurface migration lie between 0.6 and 1.2 eV; in comparison, density functional theory calculations predict a barrier of ca. 0.75 eV. The wide scatter of the experimental values might be attributed to inhomogeneously distributed subsurface defects in the reduced sample.
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