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PDMS Device Fabrication and Surface Modification
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Super-smooth surface fabrication technique and experimental research.

Linghua Zhang1, Junlin Wang, Jian Zhang

  • 1The State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, China. zhanglinghuahit@163.com

Applied Optics
|October 4, 2012
PubMed
Summary

Wheel polishing is a novel technique for creating super-smooth optical surfaces. This method effectively reduces surface roughness, proving its feasibility for high-precision optics fabrication.

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Area of Science:

  • Optical engineering
  • Materials science
  • Manufacturing processes

Background:

  • High-precision optical components require super-smooth surfaces.
  • Existing fabrication techniques may have limitations in achieving desired smoothness.

Purpose of the Study:

  • To introduce and investigate wheel polishing as a novel technique for super-smooth surface fabrication.
  • To analyze the machining mechanism and removal function contours of wheel polishing.
  • To assess the feasibility of wheel polishing for fabricating optical components.

Main Methods:

  • Utilizing elastohydrodynamic lubrication theory to analyze wheel head deformation, pressure, and fluid film thickness.
  • Numerically simulating pressure and shear stress at the slurry-sample interface.

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Last Updated: May 18, 2026

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  • Conducting practical polishing experiments to determine the relationship between wheel-sample distance and machining rate.

    • Main Results:

    • Demonstrated that wheel-sample distance directly influences removal function contours.
    • Observed that wheel surface ripples induce transverse prints on removal function contours.
    • Achieved a reduction in fused silicon surface roughness from 1.267 nm (rms) to less than 0.5 nm (rms).

    Conclusions:

    • Wheel polishing is a feasible technique for super-smooth surface fabrication.
    • Understanding the influence of parameters like wheel-sample distance is crucial for optimizing the process.
    • The technique shows promise for applications in high-precision optical instruments.