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Related Experiment Video

Updated: May 18, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Multiwavelength-integrated local model fitting method for interferometric surface profiling.

Akihiro Yamashita¹, Masashi Sugiyama, Katsuichi Kitagawa

¹Tokyo Institute of Technology, 2-12-1 O-okayama, Tokyo 152-8552, Japan. yamashita@sg.cs.titech.ac.jp

|October 4, 2012

Summary

This summary is machine-generated.

The multiwavelength-integrated local model fitting (MI-LMF) method enhances surface profiling by directly integrating data from multiple wavelengths. This approach extends measurement range and improves accuracy compared to previous methods.

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Area of Science:

Optical metrology
Surface metrology
Interferometry

Background:

Local model fitting (LMF) offers fast, vibration-robust surface profiling.
Standard LMF has a limited measurement range (height difference < λ/4).
Multiwavelength-matched LMF (MM-LMF) extends range but is sensitive to individual solution errors.

Purpose of the Study:

To introduce a novel multiwavelength-integrated LMF (MI-LMF) method.
To overcome the limitations of existing range-extended LMF techniques.
To achieve accurate surface profiling over an extended range.

Main Methods:

Development of the MI-LMF algorithm for integrated multiwavelength data processing.
Application of LMF to interference images from multiple wavelengths.
Direct computation of a range-extended solution from integrated data.

Main Results:

The MI-LMF method directly computes a range-extended solution.
Demonstrated effectiveness through simulations and experimental validation.
Potential for improved accuracy and robustness in surface profiling.

Conclusions:

MI-LMF offers a robust and accurate approach for extended-range surface profiling.
The integrated method mitigates phase unwrapping errors common in MM-LMF.
MI-LMF represents a significant advancement in optical metrology for surface characterization.