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Vertically aligned carbon nanotubes for microelectrode arrays applications.

J R Castro Smirnov1, Eric Jover, Roger Amade

  • 1FEMAN Group, Department of Applied Physics and Optics, IN2UB, Universitat De Barcelona, C/ Martí i Franquéès, 1, 08028 Barcelona, Spain.

Journal of Nanoscience and Nanotechnology
|October 6, 2012
PubMed
Summary

A new method fabricates carbon nanotube electrodes for microelectrode arrays. This technique produces dense, vertically aligned carbon nanotubes (VACNTs) compatible with microfabrication processes.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Electrical Engineering

Background:

  • Microelectrode arrays are crucial for various applications.
  • Fabricating reliable electrodes with specific properties is challenging.
  • Carbon nanotubes offer unique electrical and mechanical advantages.

Purpose of the Study:

  • To develop and define a methodology for fabricating carbon nanotube-based electrodes.
  • To ensure the electrodes are suitable for microelectrode array applications.
  • To create vertically aligned carbon nanotube (VACNT) mats compatible with standard lithography.

Main Methods:

  • Exploration and definition of a fabrication methodology.
  • Utilizing plasma-enhanced chemical vapor deposition (PECVD).

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  • Focusing on achieving highly regular and dense VACNT mats.

    • Main Results:

    • A defined methodology for fabricating carbon nanotube electrodes was established.
    • The fabricated VACNT mats demonstrated high regularity and density.
    • Compatibility with standard microelectrode array lithography was achieved.

    Conclusions:

    • The developed methodology enables the fabrication of advanced carbon nanotube electrodes.
    • These electrodes are suitable for microelectrode array applications.
    • The VACNT mats are compatible with existing microfabrication technologies, paving the way for improved devices.