Low-loss optical waveguides and Y-branch splitters in lithium niobate fabricated by MeV oxygen ions with low dose

Single-mode optical waveguides in LiNbO(3) substrate with loss as low as 0.17dB/cm were fabricated by a multi-energy low-dose ion implantation technology and cumulative annealing treatment. A waveguide Y-Branch splitter was demonstrated. Index profile in waveguide is described based on the ion implantation-induced damage profile, and propagation property in waveguide is simulated. Simulation results show a good consistence with the measured ones.