Masking and Demasking Agents
Methods of Medium Optimization
Reducing Line Loss
Source Transformation
Optimization Problems
Fast Fourier Transform
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Jia Li1, Yijiang Shen, Edmund Y Lam
1Imaging Systems Laboratory, Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China.
This study introduces a weighted Source Mask Optimization (SMO) to speed up integrated circuit (IC) printing. The new method focuses corrections on critical areas, improving efficiency and pattern accuracy.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: