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Updated: May 17, 2026

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Hybrid III/V silicon photonic source with integrated 1D free-space beam steering
J K Doylend1, M J R Heck, J T Bovington
1Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106, USA. doylend@ece.ucsb.edu
Optics Letters
|October 18, 2012
Summary
A novel chip-scale optical source with integrated beam steering was developed. This hybrid silicon device enables precise optical phased array beam control across a wide field of view.
Area of Science:
- Photonics and Optical Engineering
- Integrated Optics
- Semiconductor Devices
Background:
- Optical beam steering is crucial for applications like LiDAR and free-space optical communication.
- Current systems often face limitations in size, power consumption, and integration complexity.
- Developing compact, on-chip solutions for beam steering remains a significant challenge.
Purpose of the Study:
- To demonstrate a chip-scale optical source with integrated beam steering capabilities.
- To leverage hybrid silicon photonics for a compact and efficient optical phased array.
- To achieve precise control over the optical beam's direction and width.
Main Methods:
- Fabrication of a hybrid silicon chip integrating a laser, waveguide splitter, amplifiers, phase modulators, and surface gratings.
- Implementation of an optical phased array architecture for beam steering.
- Tuning of the phased array to control the output beam's direction and characteristics.
Main Results:
- Successful demonstration of a chip-scale optical source with integrated beam steering.
- Achieved beam steering across a 12° field of view in one axis.
- Obtained a beam width of 1.8° (steered axis) × 0.6° (nonsteered axis) with 7 dB background suppression.
Conclusions:
- The hybrid silicon platform enables the creation of compact optical phased arrays for beam steering.
- The demonstrated device offers precise control over beam direction and width within a significant field of view.
- This technology holds promise for miniaturized optical systems requiring agile beam control.

