Updated: May 17, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Tingyin Ning1, Henna Pietarinen, Outi Hyvärinen
1Department of Physics, Tampere University of Technology, P.O. Box 692, Tampere FI-33101, Finland. tingyin.ning@tut.fi
We achieved a thousand-fold enhancement in second-harmonic generation using silicon nitride (SiN) resonant waveguide gratings. This all-dielectric approach offers superior nonlinear optical performance compared to traditional methods.
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: