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Updated: May 17, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
High-Q microresonators for mid-IR light sources and molecular sensors
Brandyn Way1, Ravinder K Jain, Mani Hossein-Zadeh
1Center for High Technology Materials, University of New Mexico, Albuquerque, New Mexico 87106, USA.
Abstract:
We propose and demonstrate a simple and reliable method for fabricating high-quality whispering-gallery mode (WGM) optical microresonators in "mid-IR relevant" low-loss ZrF(4)-BaF(2)-LaF(3)-AlF(3)-NaF (ZBLAN) glasses. Intrinsic quality factors of 10(7) have been demonstrated, providing great promise for WGM-based mid-IR (MIR) devices. Absorption-limited Q-factors of over 3×10(8) are anticipated over the 2.0 to 3.2 μm MIR wavelength range in ZBLAN microcavities in the foreseeable future.
