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Updated: May 17, 2026

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials
Published on: March 23, 2017
Submicrometer radius and highly confined plasmonic ring resonator filters based on hybrid metal-oxide-semiconductor
Hong-Son Chu1, Yuriy Akimov, Ping Bai
1Electronics and Photonics Department, A*STAR-Institute of High Performance Computing, Singapore. chuhs@ihpc.a‑star.edu.sg
Abstract:
We numerically report the submicrometer radius (0.5 μm) and high confinement (mode area ~λ(2)/1200) plasmonic ring resonators for both all-pass and add-drop filters based on the hybrid metal-oxide-semiconductor (Ag-SiO(2)-Si) waveguide platform. The best tradeoff between the propagation length and the confinement of this hybrid plasmonic waveguide platform is also discussed and compared to the dielectric-loaded plasmonic waveguide counterpart. We show that the ring resonator all-pass filter features an extinction ratio as high as 23 dB with a transmission loss of 1.5 dB, and a wide free spectral range of 168 nm with a bandwidth of 14 nm. Moreover, the demonstrated add-drop filter achieves an extinction ratio larger than 12 dB with a channel isolation between the through and drop channels of 13.5 dB at the resonant wavelength. These demonstrated plasmonic devices reveal as potential building blocks for future nanoscale electronic-photonic integrated circuits.

